Raws li kev tsim kho tiag tiag ntawm qhov chaw tsim cov dej ntshiab ultrapure nrog kev tiv thaiv siab tshaj 18.2 MΩ·cm, tsab xov xwm no qhia txog cov txheej txheem tseem ceeb ntawm kev tsim dej ultrapure. Nws muab cov ntsiab lus tshwj xeeb rau cov khoom siv kav dej siv nyob rau ntau theem ntawm kev kho dej thiab muab cov ncauj lus kom ntxaws txog kev teeb tsa cov kav dej ultrapure raws li kev ua tau zoo.
I. Txheej txheem cej luam ntawm Ultrapure Dej System
Nrog rau txoj kev loj hlob ntawm kev lag luam hluav taws xob, cov kev xav tau rau cov dej zoo thaum lub sij hawm tsim khoom thiab kev ua haujlwm tau dhau los ua nruj. Txhawm rau kom paub tseeb tias kev tsim khoom ntawm ultra-loj- nplai sib xyaw ua ke, siab - dej huv- nrog rau siab- cov khoom siv purity, roj, thiab tshuaj lom neeg- yog qhov tseem ceeb. Ultrapure dej tshuab hloov cov qauv hauv nroog mus rau hauv dej ultrapure uas ua tau raws li cov qauv nruj hais txog cov ntsiab lus ion thiab qhov loj me.
Feem ntau, lub tshuab dej ultrapure muaj peb ntu tseem ceeb:
Ultrapure dej ntau lawm cheeb tsam (CUB seem),
Ultrapure dej polishing thiab ncig cheeb tsam (FAB seem),
Ultrapure water distribution piping network (ntau qhov chaw siv hauv FAB).
Lub cheeb tsam ultrapure dej yog qhov nyuaj tshaj plaws thiab tuaj yeem muab faib ua peb ntu ntxiv:
Ua ntej-kev kho mob,
Thawj purification,
Ultrapure dej kev kho mob.
Cov kev kho ua ntej - feem ntau suav nrog cov xuab zeb pom thiab ua kom cov pa roj carbon monoxide (qee lub tuam txhab kuj ntxiv cov tshuaj tiv thaiv tso tsheb hlau luam thiab cov roj av flotation tso tsheb hlau luam ua ntej cov xuab zeb pom);
Lub hauv paus purification feem ntau suav nrog anion/cation exchange towers, degasification towers (DG), kev nyab xeeb lim, UV sterilizers, thiab multi-stage reverse osmosis units;
Cov dej ntshiab ultrapure feem ntau suav nrog MDG (membrane deoxygenation modules), TOC-UV sterilizers, mix- txaj (MB) ion exchangers, thiab taw tes- ntawm - siv cov lim dej.
Txawm li cas los xij, txij li cov kav dej tuaj yeem rov- paug cov dej thaum thauj mus rau cov khoom siv, polishing thiab ncig system feem ntau yog nruab rau hauv FAB. Lub kaw lus no yog nyob rau hauv cov khoom sib xyaw- txaj (MB) cov khoom ntxiv los ntawm cov khoom siv ultrafiltration (UF) kom tshem tawm cov impurities leached rau hauv cov dej los ntawm cov kav dej hauv lub sijhawm xa mus rau cov kab ntau lawm.
II. Cov Khoom Piping Feem ntau siv nyob rau txhua theem ntawm Ultrapure Dej System
Xaiv cov khoom siv kav dej zoo yog qhov tseem ceeb rau cov tshuab dej ultrapure; kev xaiv yuav tsum xyuas kom meej cov dej zoo thaum tseem tshuav nyiaj txiag tsim nyog. Feem ntau siv cov khoom siv hauv cov kav dej hauv cov dej ntshiab muaj xws li PVC, SGP, SGP (RL), SUS304, CPVC, SUS316, thiab PVDF. PVC los yog SUS304 piping feem ntau yog siv thaum lub sij hawm pretreatment theem ntawm ultrapure dej ntau lawm. Roj hmab-lined steel piping (SGP-RL) feem ntau yog siv rau cov khoom siv- sab kev sib txuas, thaum SUS304 piping yog siv nyob ib ncig ntawm lub tshuab vibrating xws li twj tso kua dej; CPVC los yog SUS304 piping yog siv rau cov kab ntws tseem ceeb thaum lub sij hawm thawj purification. Vim muaj kev kub siab, ntu nruab nrab ntawm lub siab - lub twj tso kua mis siab thiab rov qab osmosis (RO) chav tsev xav tau SCH80 SUS304 piping thiab flanges ntsuas rau 2.0 MPa. Txij li cov txheej txheem RO muaj cov dej kub tshwj xeeb, cov khoom siv hluav taws xob feem ntau yog nruab rau ntawm RO chav tsev, thiab SUS304 piping yuav tsum tau siv nyob rau hauv lawv cheeb tsam. SUS316 thiab CPVC kav dej feem ntau yog siv rau cov kab ntws tseem ceeb thaum lub sij hawm tsim dej ultrapure. Cov kab ntws tseem ceeb hauv thaj chaw polishing feem ntau siv SUS316 piping (welded kev sib txuas uas yuav tsum tau muaj kev nkag mus rau tag nrho / ob npaug-sided weld hlaws tsim) thiab PVDF piping, thaum CPVC piping yog siv rau ultrapure dej rov qab kab. Standard PVC piping yog siv rau cov kab dej pov tseg thoob plaws txhua theem kev kho dej hauv qab no. Kev cuam tshuam -cov kav dej PVC tiv taus yog xav tau rau cov tshuaj siv tshuaj (xws li cov kua qaub thiab alkalis) hauv cov txheej txheem dej ntshiab. SUS304 piping yog siv rau cov nitrogen uas ua haujlwm rau cov dej ntshiab huv, qhov SUS316 piping yog siv rau cov kab nitrogen hauv cov dej ntshiab ultrapure. SUS304 los yog SGP piping feem ntau yog siv rau compressed cua tshuab uas lub hwj chim pneumatic li qub; Yog tias siv SGP piping, lub lim yuav tsum tau teeb tsa ua ntej cov kab nkag mus rau ib qho hluav taws xob tswj vaj huam sib luag.
III. Ultrapure Dej System Kev Tsim Kho
Kev tsim kho ntawm qhov chaw nres tsheb dej ultrapure nthuav tawm qhov kev sib tw loj tshaj plaws thiab suav nrog peb yam tseem ceeb: kev xa khoom thiab kev teeb tsa, kev tsim thiab kev teeb tsa ntawm cov yeeb nkab sib koom, thiab kev teeb tsa cov kav dej. Thaum tsiv cov cuab yeej siv, yuav tsum npaj cov phiaj xwm nqa kom ntxaws -tshwj xeeb tshaj yog rau cov khoom hnyav, hnyav, lossis cov khoom tawg yooj yim- kom nruj me ntsis kom tsis txhob ua yuam kev lossis teeb meem kev teeb tsa. Ob qhov tseem ceeb yuav tsum tau saib xyuas thaum lub sij hawm tsim kho ntawm kev sib koom kev txhawb nqa racks: ua ntej, kev sib txuas ntawm cov khib nyiab thiab cov qauv pej xeem yuav tsum muaj zog, qhov zoo tshaj yog siv cov hlau nplaum. Yog tias ua ntej -embedding tsis tuaj yeem yog vim li cas, cov khoom siv tshuaj lom neeg yuav tsum tau siv los tuav cov kev txhawb nqa rau cov kab; txheem, yooj yim expansion bolts tsis tso cai. Nyob rau hauv tsis muaj qhov xwm txheej yuav tsum tau hlau daim hlau thiab yooj yim expansion bolts siv los thauj cov kev txhawb nqa rau hauv pem teb slab. Qhov thib ob, tag nrho cov yeeb nkab khib yuav tsum tau khaws cia qib kom tsis txhob muaj cov yeeb nkab dabtsi yog khoov lossis puas tsuaj los ntawm kev ntxhov siab tsis sib xws ntawm cov ntsiab lus sib txuas ntawm cov yeeb nkab thiab cov khib nyiab. Hais txog kev teeb tsa cov kav dej ntawm qhov chaw nres tsheb dej, thaum CDA, nitrogen, thiab cov khoom siv hluav taws xob hloov hluav taws xob los yog cov kav dej kub / dej txias tuaj yeem ntsia tau qhov system- los ntawm -system, kev teeb tsa ntawm lwm qhov chaw nres tsheb kav dej tau muab faib ua ob qhov tseem ceeb: cov kav dej khib nyiab thiab cov khoom siv - cov kav dej nyob ib sab. Ob qhov no tuaj yeem ua tiav ib txhij thaum lub sijhawm pib ntawm kev tsim kho. Thaum cov ntu ncaj nraim ntawm cov khib nyiab thiab cov kav dej tam sim ntawd nyob ib puag ncig cov cuab yeej ua tiav, kev sib txuas ntawm cov khoom siv - cov kav dej uas nyob ib sab thiab cov kav dej khib nyiab yuav tsum raug tua kom tsim cov kav dej kaw. Kev teeb tsa ntawm cov kav dej ultrapure dej sib txawv ntawm cov kav dej dav dav; Tshaj li kev ua kom lub cev tsis muaj zog, qhov tseem ceeb yuav tsum tau ua yog tswj xyuas cov yeeb nkab kom huv si thoob plaws hauv txheej txheem installation. Hauv qab no, kuv yuav tham txog cov txheej txheem kev teeb tsa tshwj xeeb rau CPVC (Chlorinated Polyvinyl Chloride) thiab PVDF (Polyvinylidene Fluoride) piping hauv dej ultrapure.
IV. Kev teeb tsa ntawm CPVC thiab PVDF Piping hauv Ultrapure Dej Systems
CPVC thiab PVDF piping cov ntaub ntawv ua tau raws li qhov yuav tsum tau ua ntawm ultrapure dej systems hais txog kev leaching ntawm cov hlau ions thiab cov organic carbon, tsis muaj cov khoom zoo, thiab kev tiv thaiv kev loj hlob ntawm cov kab mob. Raws li cov kav dej thiab cov khoom siv tau ua tiav thiab ntim rau hauv ultra- ib puag ncig huv, lawv cov kev teeb tsa muaj cov txheej txheem tshwj xeeb. Rau CPVC piping, Japanese- ua "Tsis yog. 85" cov yeeb nkab yas nplaum yuav tsum tau siv. Kev txiav cov yeeb nkab yuav tsum tau ua los ntawm kev siv lub tshuab hluav taws xob los yog lub tshuab hluav taws xob tig; kev siv tes saws yuav tsum zam thaum twg los tau (raws li lawv tawm nyuaj-kom- tshem tawm burrs ntawm qhov txiav xaus). Burrs ntawm qhov txiav xaus yuav tsum tau muab tshem tawm kom huv si, thiab 2-3 hli chamfer yuav tsum tau siv rau cov yeeb nkab kawg. Qhov no tiv thaiv cov nplaum los ntawm kev khawb rau hauv lub qhov (socket) thaum sib txuas- qhov yuam kev uas tuaj yeem txo qhov kev sib txuas ntawm thaj chaw sib txuas thiab ua rau xau ntawm qhov sib koom ua ke. Adhesive yuav tsum tau siv sib npaug rau qhov sib txuas ntawm cov yeeb nkab fittings thiab cov kav dej. Ua ntej thov, tshem tawm cov plua plav saum npoo ntawm cov khoom siv sab hauv thiab sab nrauv ntawm cov kav dej siv daim ntaub dawb, tom qab ntawd degrease thiab ntxuav lawv nrog lint -dawb daim ntaub dampened nrog acetone. Ntxiv rau qhov no, kev tswj kom huv si thaum lub sijhawm teeb tsa yog qhov tseem ceeb heev - qhov no yog qhov sib txawv ntawm CPVC piping installation thiab cov qauv PVC kav. Hais lus nruj me ntsis, CPVC yeeb nkab sib txuas yuav tsum tau ua nyob rau hauv ib puag ncig huv si, nrog kev sib txuas zaum kawg ntawm -qhov chaw siv flanges. Txawm li cas los xij, vim yog qhov chaw tshwj xeeb, kev txiav, kev sib txuas, thiab kev teeb tsa feem ntau tshwm sim ntawm -site. Hauv qhov no, thaj chaw ua haujlwm yuav tsum tau ua kom huv si (tsis muaj plua plav hnyav). Kev sib txuas lus yuav tsum tsis txhob ua ncaj qha rau hauv av; Hloov chaw, yuav tsum tau siv lub platform tshwj xeeb fabrication. Cov neeg ua haujlwm yuav tsum hnav cov hnab looj tes tshwj xeeb hauv chav huv huv; kov cov phab ntsa hauv cov yeeb nkab nrog ob txhais tes liab qab yog txwv tsis pub (vim cov roj ntawm daim tawv nqaij hloov mus rau sab hauv phab ntsa yog qhov nyuaj rau ntxuav tawm). Siv lub tshuab rub tawm los yog cov cuab yeej zoo sib xws thaum ntxig cov kav dej, thiab kos cov yeeb nkab kom paub tseeb qhov tob tob txaus. PTFE (polytetrafluoroethylene) yuav tsum tau siv los ua cov khoom sib khi ntawm flanges. Cov kav dej yuav tsum tau tiv thaiv thaum khaws cia los ntawm kev tso rau ntawm tarpaulins lossis cov ntawv yas.
PVDF piping systems cia siab rau tag nrho cov kev sib txuas welded. Kev huv huv thaum lub sijhawm ua haujlwm thiab kev tswj hwm nruj ntawm qhov chaw teeb tsa yog qhov tseem ceeb. PVDF yeeb nkab vuam yuav tsum tau ua nyob rau hauv ib tug tshwj xeeb huv enclosure; chav tsev ib puag ncig yog tsis tsim nyog. Cov neeg ua haujlwm nkag mus rau qhov chaw tsim khoom huv si yuav tsum hloov mus rau hauv cov khau tshwj xeeb, thiab cov yeeb nkab kawg thiab cov khoom siv yuav tsum tau kaw kom txog thaum lawv nyob hauv thaj chaw huv. Ntim cov ntaub ntawv rau fittings yuav tsum tsuas yog muab tshem tawm tam sim ntawd ua ntej installation. Cov hnab looj tes huv PVC pov tseg yuav tsum tau hnav thaum vuam, thiab cov yeeb nkab kawg yuav tsum tau degreased thiab ntxuav nrog isopropyl cawv, ethanol, lossis acetone ua ntej vuam pib. Tsuas yog lint - cov ntaub huv huv yuav tsum tau siv los ntxuav, thiab cov ntaub so ntswg yuav tsum tau hloov tam sim ntawd. Cov neeg ua haujlwm pab nrog cov txheej txheem vuam yuav tsum hnav cov hnab looj tes huv. Kev tshuaj xyuas qhov muag yuav tsum tau ua tam sim tom qab txhua qhov vuam ua tiav; lub weld hlaws nyob ib ncig ntawm qhov sib koom ua ke yuav tsum tsis sib xws hauv qhov siab thiab protrude saum npoo ntawm cov yeeb nkab. Thaum PVDF cov kav dej tau raug welded, cov yeeb nkab kawg yuav tsum tau muab kaw kom sai ua ntej thauj mus rau qhov chaw teeb tsa, qhov chaw flange txuas - siv PTFE gaskets - yog ua haujlwm. Thaum lub sij hawm kev teeb tsa, qhov tseeb ntawm - qhov chaw ntsuas tau raug coj los ua cov ntaub ntawv ntxaws ntxaws thiab kev teeb tsa, tom qab uas cov neeg ua haujlwm tshwj xeeb nqa tawm qhov vuam thiab fabrication. Welding thiab installation pawg ua haujlwm nrog cov luag haujlwm kom meej meej kom ua tiav kev ua haujlwm zoo tshaj plaws.
V. Xaus
Hauv cov ntsiab lus, kev tsim kho cov dej ntshiab huv yuav tsum tsis yog ua raws li cov txheej txheem nruj - nruj nruj tab sis, qhov tseem ceeb tshaj, kev tsom mus rau kev txhawb nqa "kev paub txog kev huv" ntawm cov neeg ua haujlwm tsim kho. Cov neeg ua haujlwm yuav tsum ua raws li cov txheej txheem rau kev txhim kho cov kav dej huv thiab ua haujlwm raws li cov kev cai tshwj xeeb ntawm txhua theem kev kho dej. Txoj hauv kev no tiv thaiv kev sib kis los ntawm kev tsim kho tsis raug- uas tuaj yeem cuam tshuam cov dej tsis zoo, ua tsis tau raws li cov neeg siv khoom tshwj xeeb, thiab ua rau muaj kev cuam tshuam zoo - cuam tshuam.
